Wafer-level Vertical Magnetic Field Probe Station
Detailed parameter introduction
| Model | DX1PS4 |
| Magnetic field direction | Vertical |
| Magnetic field strength | Vertical magnetic field>700mT |
| Is the air gap adjustable | No |
| Sample size | 12-inch wafer (downward compatible with fragmentation test) |
| Probe type and quantity | DC probes (set of 4) or microwave probes (set of 4) |
| Sample Stage Parameters | XY electric control travel ±150mm, adjustment accuracy 2 um; T-axis manual adjustment ±5°, minimum adjustment accuracy 5° |
| Microscope type | Monocular microscope |
| Product description | ▹ Vertical magnetic field probe station, except for the magnet, the structure is universally designed, and the magnetic field uniformity is ±1%@φ1 mm; ▹ Real-time monitoring and feedback of magnetic field strength, the monitoring accuracy is better than 1%, and the magnetic field resolution is better than 0.02 mT; ▹ It can accommodate up to 12 inches of wafers, and is backward compatible with 8 inches, 6 inches, and fragments; ▹ Compatible with up to 4 sets of probes (RF or DC test); ▹ Provide the rapid lifting function of the Z-axis probe platform to achieve efficient testing. |
| Equipment can provide upgrade points | The manual lifting function of the Z-axis probe platform can be upgraded to electric control |
Vertical magnetic field probe station, except for the magnet, the structure is universally designed, and the magnetic field uniformity is ±1%@φ1 mm;
Real-time monitoring and feedback of magnetic field strength, the monitoring accuracy is better than 1%, and the magnetic field resolution is better than 0.02 mT;
Real-time monitoring and feedback of magnetic field strength, the monitoring accuracy is better than 1%, and the magnetic field resolution is better than 0.02 mT;
