Wafer Level Automatic in-plane Magnetic Field Probe Station
Detailed parameter introduction
| Model | DX1PS3 |
| Magnetic field direction | In-plane |
| Magnetic field strength | In-plane magnetic field>330mT |
| Is the air gap adjustable | No |
| Sample size | 12-inch wafer (downward compatible with fragmentation test) |
| Probe type and quantity | DC probes (set of 4) or microwave probes (set of 4) |
| Sample Stage Parameters | XY electric control travel ±150mm, adjustment accuracy 2 um; T-axis manual adjustment ±5°, minimum adjustment accuracy 5° |
| Microscope type | Monocular microscope |
| Product description | ▹ In-plane/perpendicular magnetic field probe station, except for the magnet, the structural versatility design magnetic field uniformity is ±1%@d1mm; ▹ Real-time monitoring and feedback of magnetic field strength, the monitoring accuracy is better than 1%, and the magnetic field resolution is better than 0.02mT; ▹ Holds up to 12-inch wafers and is backward compatible with 8-inch and 6-inch chips; ▹ Compatible with up to 4 sets of probes (RF or DC test); ▹ Provide Z-axis probe platform rapid lifting function to achieve efficient testing. |
| Equipment can provide upgrade points | The manual lifting function of the Z-axis probe platform can be upgraded to electric control |
In-plane magnetic field probe station, with universal design except for magnet, magnetic field uniformity ±1%@φ1 mm;
Real-time monitoring and feedback of magnetic field strength, the monitoring accuracy is better than 1%, and the magnetic field resolution is better than 0.02 mT;
Real-time monitoring and feedback of magnetic field strength, the monitoring accuracy is better than 1%, and the magnetic field resolution is better than 0.02 mT;
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Wafer Level Automatic in-plane Magnetic Field Probe Station
